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The science and engineering of microelectronic fabrication Stephen A. Campbell.

By: Material type: TextTextPublication details: New York Oxford University Press 1996.Description: xv, 536 p. ill. 25 cmISBN:
  • 0195105087
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Holdings
Item type Current library Collection Call number Status Date due Barcode
Open Shelf PERPUSTAKAAN POLITEKNIK IBRAHIM SULTAN Book TK7871.85 .C25 1996 (Browse shelf(Opens below)) Available 0000022262

Includes bibliographical references and index.

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