The science and engineering of microelectronic fabrication
Campbell, Stephen A. 1954-
The science and engineering of microelectronic fabrication Stephen A. Campbell. - New York Oxford University Press 1996. - xv, 536 p. ill. 25 cm.
Includes bibliographical references and index.
0195105087
Semiconductors--Design and construction.
The science and engineering of microelectronic fabrication Stephen A. Campbell. - New York Oxford University Press 1996. - xv, 536 p. ill. 25 cm.
Includes bibliographical references and index.
0195105087
Semiconductors--Design and construction.