| 000 | 00584nam a2200181 4500 | ||
|---|---|---|---|
| 001 | 0000014482 | ||
| 008 | 231118s9999 xx 000 0 und d | ||
| 020 | _a9780470466346 | ||
| 040 | _aPoliteknik Ibrahim Sultan | ||
| 090 | 0 | 0 |
_aTK7875 _b.P75 2011 |
| 100 | 1 | _aLee, Ki Bang | |
| 245 | 1 | 0 |
_aPrinciples of microelectromechanical systems _cKi Bang Lee |
| 260 |
_aHoboken, New Jersey _bJohn Wiley & sons _c2011 |
||
| 300 |
_axii, 667p _bill. _c24cm |
||
| 500 | _aincludes index p.661 - 667 | ||
| 504 | _aIncludes bibliographical references | ||
| 650 | 0 | _aMicroelectromechanical systems | |
| 999 |
_c135709 _d135709 |
||