| 000 | 00648nam a2200193 4500 | ||
|---|---|---|---|
| 001 | 0000011218 | ||
| 008 | 231118s9999 xx 000 0 und d | ||
| 020 | 0 | 0 | _a8179924750 |
| 040 | _aPJB | ||
| 090 | 0 |
_aTK7874. _bH236 2005 |
|
| 245 | 0 | 0 |
_aHandbook of VLSI microlithography _bPrinciples, tools, technology and applications _cedited by John N. Helbert |
| 260 | 0 | 0 |
_aMumbai _bJaico Pub. House _c2005 |
| 300 |
_a1001p. _bill. _c25cm |
||
| 500 | 0 | 0 | _aincludes index :p.957 - 1001 |
| 504 | 0 | _aincludes references:p.948 - 956 | |
| 650 | 0 | 0 |
_aIntegrated circuits _xvery large scale integration |
| 650 | 0 | 0 | _aMicrolithography |
| 700 | 0 | 0 | _aHelbert, John N. |
| 999 |
_c125917 _d125917 |
||