| 000 | 00500nam a2200169 4500 | ||
|---|---|---|---|
| 001 | 0000004868 | ||
| 008 | 231118s9999 xx 000 0 und d | ||
| 020 | 0 | 0 | _a0131472860 |
| 040 | _aPoliteknik Johor Bahru | ||
| 090 | 0 |
_aTK7875 . _bL48 2006 |
|
| 100 | 0 | 0 | _aChang Liu |
| 245 | 0 | 0 |
_aFoundations Of MEMs _cChang Liu |
| 260 | 0 | 0 |
_aNew Jersey _bPearson / Prentice Hall _c2006 |
| 300 |
_axxii, 530p. _bill. _c23cm. |
||
| 500 | 0 | 0 | _aincludes index : p. 522 - 530 |
| 650 | 0 | 0 | _aMicroelectromechanical systems. |
| 999 |
_c106867 _d106867 |
||