TY  - BOOK
AU  - Lee,Ki Bang
TI  - Principles of microelectromechanical systems
SN  - 9780470466346
PY  - 2011///
CY  - Hoboken, New Jersey
PB  - John Wiley & sons
KW  - Microelectromechanical systems
N1  - includes index p.661 - 667; Includes bibliographical references
ER  -