Lee, Ki Bang <br/><br/>
Principles of microelectromechanical systems 
Ki Bang Lee 
 - Hoboken, New Jersey  John Wiley & sons  2011 
 - xii, 667p  ill.  24cm 
<br/><br/> includes index p.661 - 667 
<br/><br/>Includes bibliographical references 
<br/><br/><label>ISBN: </label>9780470466346 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems