TY  - BOOK
AU  - Helbert, John N.
TI  - Handbook of VLSI microlithography: Principles, tools, technology and applications
SN  - 8179924750
PY  - 2005///
CY  - Mumbai
PB  - Jaico Pub. House
KW  - Integrated circuits
KW  - very large scale integration
KW  - Microlithography
N1  - includes index :p.957 - 1001; includes references:p.948 - 956
ER  -