TY  - BOOK
AU  - Kovacs,Gregory T.A.
TI  - Micromachined transducers sourcebook
SN  - 0072907223
PY  - 1998///
CY  - London
PB  - VGM Career Books
KW  - Microelectromechanical systems
KW  - Transducers
N1  - includes index
ER  -