Kovacs, Gregory T. A. <br/><br/>
Micromachined transducers sourcebook 
Greory T.A Kovacs 
 - London  VGM Career Books  1998. 
 - 911 p.  ill.  25cm. 
<br/><br/> includes index 
<br/><br/><label>ISBN: </label>0072907223 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems<br/>Transducers