Campbell, Stephen A.  1954- <br/><br/>
The science and engineering of microelectronic fabrication 
Stephen A. Campbell. 
 - New York  Oxford University Press  1996. 
 - xv, 536 p.  ill.  25 cm. 
<br/><br/>Includes bibliographical references and index. 
<br/><br/><label>ISBN: </label>0195105087 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Semiconductors--Design and construction.