Chang Liu <br/><br/>
Foundations Of MEMs 
Chang Liu 
 - New Jersey  Pearson / Prentice Hall  2006 
 - xxii, 530p.  ill.  23cm. 
<br/><br/> includes index : p. 522 - 530 
<br/><br/><label>ISBN: </label>0131472860 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems.