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Principles of microelectromechanical systems

Lee, Ki Bang

Principles of microelectromechanical systems Ki Bang Lee - Hoboken, New Jersey John Wiley & sons 2011 - xii, 667p ill. 24cm

includes index p.661 - 667

Includes bibliographical references

ISBN: 9780470466346

Subjects--Topical Terms:
Microelectromechanical systems

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